Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate
| Publication | Article in Microwave and Optical Technology Letters, published November 2007 |
|---|---|
| Authors | Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol, Jaume Esteve |
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