Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures
| Publication | Article in Quantum Electronics, published April 2019 |
|---|---|
| Authors | M.M. Barysheva, S.A. Garakhin, S.Yu. Zuev, V.N. Polkovnikov, N.N. Salashchenko, M.V. Svechnikov,...[ show more ] |
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