Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support
| Publication | Article in Journal of Vibration and Acoustics, published December 2016 |
|---|---|
| Authors | Mark Pallay, Shahrzad Towfighian |
This is the public page for a publication record in Dimensions, a free research insights platform that brings together information about funding, scholarly outputs, policy, patents and grants.
Loading metrics…