Development of void-free focused ion beam-assisted metal deposition process for subhalf-micrometer high aspect ratio vias
| Publication | Article in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, published November 2003 |
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| Authors | Valery Ray, Nicholas Antoniou, Neil Bassom, Alex Krechmer, Andrew Saxonis |
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