Self-powered near field electron lithography
Publication | Article in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, published November 2009 |
---|---|
Authors | Yuerui Lu, Norimasa Yoshimizu, Amit Lal |
This is the public page for a publication record in Dimensions, a free research insights platform that brings together information about funding, scholarly outputs, policy, patents and grants.
Loading metrics…