6H- AND 4H-SiC(0001) Si SURFACE RICHNESS DOSING BY HYDROGEN ETCHING: A WAY TO REDUCE THE FORMATION TEMPERATURE OF RECONSTRUCTIONS
Publication | Article in Surface Review and Letters, published February 2003 |
---|---|
Authors | M. DIANI, J. DIOURI, L. KUBLER, L. SIMON, D. AUBEL, D. BOLMONT |
This is the public page for a publication record in Dimensions, a free research insights platform that brings together information about funding, scholarly outputs, policy, patents and grants.
Loading metrics…