In-Situ Selective Area Etching of GaAs in Metalorganic Molecular Beam Epitaxy Chamber using Trisdimethylaminoarsenic
| Publication | Article in Japanese Journal of Applied Physics, published July 1996 |
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| Authors | Toshihiko Hayashi, Hajime Asahi, Kazuhiko Yamamoto, Ken-ichi Hidaka Ken-ichi Hidaka, Shun-ichi...[ show more ] |
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