In Situ Optical Analysis of the Gas Phase during the Deposition of Silicon Carbide from Methyltrichlorosilane
| Publication | Article in Journal of The Electrochemical Society, published May 1996 |
|---|---|
| Authors | M. Ganz, N. Dorval, M. Lefebvre, M. Péalat, F. Loumagne, F. Langlais |
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