Interaction Forces Between a Glass Surface and Ceria-Modified PMMA-Based Abrasives for CMP Measured by Colloidal Probe AFM
| Publication | Article in Journal of The Electrochemical Society, published January 2008 |
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| Authors | Silvia Armini, Ruslan Burtovyy, Mansour Moinpour, Igor Luzinov, Joke De Messemaeker, Caroline M....[ show more ] |
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