Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering
| Publication | Article in Advances in Materials Science and Engineering, published July 2017 |
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| Authors | Oleg Gorshkov, Ivan Antonov, Dmitry Filatov, Maria Shenina, Alexander Kasatkin, Alexander Bobrov,...[ show more ] |
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