Supersaturated P-Type Polycrystaline Films Produced by Rapid Thermal Annealing of High Dose Boron Ion Implants for Interconnects and Shallow Junction Diffusion Sources
| Publication | Article in MRS Advances, published December 1990 |
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| Authors | B. Raicu, M.I. Current, W.A. Keenan, D. Mordo, R. Brennan, R. Holzworth |
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