Observation of Reduced Oxidation Rates for Plasma-Assisted CVD Copper Films
| Publication | Article in MRS Advances, published January 1993 |
|---|---|
| Authors | P. J. Ding, B. Zheng, E. T. Eisenbraun, W. A. Lanford, A. E. Kaloyeros, S. Hymes, S. P. Murarka |
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