Deposition and Crystallisation Behaviour of Amorphous Silicon Thin Films Obtained by Pyrolysis of Disilane Gas at Very Low Pressure
| Publication | Article in MRS Advances, published December 1994 |
|---|---|
| Authors | T. Kretz, D. Pribat, P. Legagneux, F. Plais, O. Huet, M. Magis |
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