Effectiveness and Reliability of Metal Diffusion Barriers for Copper Interconnects
| Publication | Article in MRS Advances, published October 1995 |
|---|---|
| Authors | G. Bai, S. Wittenbrock, V. Ochoa, R. Villasol, C. Chiang, T. Marieb, D. Gardner, C. Mu, D. Fraser...[ show more ] |
This is the public page for a publication record in Dimensions, a free research insights platform that brings together information about funding, scholarly outputs, policy, patents and grants.
Loading metrics…