Model Based Temperature Control in RTP Yielding ±0.1 °C accuracy on A 1000 °C, 2 second, 100 °C/s Spike Anneal
| Publication | Article in MRS Advances, published December 1998 |
|---|---|
| Authors | Peter Vandenabeele, Wayne Renken |
This is the public page for a publication record in Dimensions, a free research insights platform that brings together information about funding, scholarly outputs, policy, patents and grants.
Loading metrics…