Synchrotron‐radiation computed laminography for high‐resolution three‐dimensional imaging of flat devices
| Publication | Article in physica status solidi (a) – applications and materials science, published July 2007 |
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| Authors | Lukas Helfen, Anton Myagotin, Alexander Rack, Petra Pernot, Petr Mikulík, Marco Di Michiel, Tilo...[ show more ] |
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