Loss reduction of silicon slot waveguides with ALD grown thin films
| Publication | Article in Proceedings of SPIE--the International Society for Optical Engineering, published January 2012 |
|---|---|
| Authors | A. Säynätjoki, L. Karvonen, T. Alasaarela, D. Korn, L. Alloatti, A. Tervonen, R. Palmer, C. Koos,...[ show more ] |
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